JPH02117652U - - Google Patents
Info
- Publication number
- JPH02117652U JPH02117652U JP14885788U JP14885788U JPH02117652U JP H02117652 U JPH02117652 U JP H02117652U JP 14885788 U JP14885788 U JP 14885788U JP 14885788 U JP14885788 U JP 14885788U JP H02117652 U JPH02117652 U JP H02117652U
- Authority
- JP
- Japan
- Prior art keywords
- ion source
- microwaves
- ion
- microwave
- source chambers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000605 extraction Methods 0.000 claims description 2
- 230000001902 propagating effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 5
- RDYMFSUJUZBWLH-UHFFFAOYSA-N endosulfan Chemical compound C12COS(=O)OCC2C2(Cl)C(Cl)=C(Cl)C1(Cl)C2(Cl)Cl RDYMFSUJUZBWLH-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14885788U JPH02117652U (en]) | 1988-11-15 | 1988-11-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14885788U JPH02117652U (en]) | 1988-11-15 | 1988-11-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02117652U true JPH02117652U (en]) | 1990-09-20 |
Family
ID=31420555
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14885788U Pending JPH02117652U (en]) | 1988-11-15 | 1988-11-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02117652U (en]) |
-
1988
- 1988-11-15 JP JP14885788U patent/JPH02117652U/ja active Pending
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